Public Research

On behalf of the public sector, we are oriented towards the research projects of the Federal Government and the Free State of Thuringia as well as European research programs. Within the framework of research clusters or joint projects, we are partners in selected projects of top-level research and thus fulfill market-preparing research assignments.

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Project Title	Acronym	End
Doping of MoSi2 resistive heater layers to improve lifetime by reducing electromigration in infrared emitters	DotIR	31.07.2027
Innovative isothermal thermopile infrared sensor	NIVO2	31.03.2027
Self-adjusting cryogenic Indium Interconnection	SAIn	31.01.2027
Photostructurable black lacquer against stray light	PuSch	31.01.2027
Quantum computing in solid state technology	QSolid	31.12.2026
Mechanical stress changes in textile substrates	MeTex	31.12.2026
Reduction of thermal influences SiDMS	Flunder	31.12.2026
Development of production-optimized Si strain gauge force sensor systems	Protekras	31.12.2026
Ultra-small pressure sensors based on MSTS diaphragms	UDM	31.12.2026
Burst-proof low pressure sensor	BerNieDru	30.11.2026
Fluorescence module with waveguiding base	FiberFLU	31.10.2026
Infrared emitter with emission-enhancing layer of carbon nanotubes	CNT-IR	31.10.2026
Modular models for piezoresistive pressure sensors	mMoDS	30.09.2026
MEMS Pirani sensor for fine and high vacuum	MinerVa	31.08.2026
Pressure sensor with minimized mechanical non-linearity	M2NL	31.08.2026
SiC detectors for high-energy radiation	SiCher	31.08.2026
DMS in ceramics	DMS in Keramik	30.06.2026
Innovative sensor cooling design	Inkan	30.04.2026
Stress management in thin membranes	SMP	30.04.2026
Quantum mechanical device simulation	QuBS	31.03.2026
Packaging technology for thermal flow sensors	Pack-Flu	31.03.2026
High-temperature-optimized contact metallizations	LaWaDos	28.02.2026
Active diamond-based scanning probes for quantum metrology and nanofabrication	DiaTip	31.01.2026
Photoacoustic sensor for hydrogen generation	NH3-BZ	31.10.2025
Hybrid integrated optical sensors based on pre-structured adhesive layers	Hivos	31.10.2025
PiezoKOMP	PiezoKOMP	31.10.2025
Cost-efficient housing for IR emitters	KHIS	31.10.2025
Thermopiles with carbon nanotube absorber	CNT-IR-TP	31.10.2025
Cryo-Resistance	Cryo-Resistance	30.09.2025
Piezo-junction effect based on-chip multi-sensors	PJS	30.09.2025
Retrofit kit for non-invasive pressure measurement	NivLer	30.09.2025
Compact sensor unit for measuring magnetic fields using diamond fluorescence	KoSenDi	30.09.2025
Innovative oxide structures	InOxA	30.09.2025
Si Heat-Flux Sensor	Si-HFS	31.07.2025
Sensor for determining the layer stress	Nanolever	31.07.2025
Stress-independent on-chip temperature detection	SOT	01.07.2025
Development of a force transducer with non-linear spring and pneumatic nozzle-baffle plate system for reliable measurement of the force increase at the point of contact and for distance detection between indenter and test specimen up to 10 µm	ApproxiSens	31.05.2025
Low Gain Avalanche Detectors for 1keV Electrons	eLGAD	30.04.2025
Piezoresistive technology platform with minimal zero offset In application: technology platform minimal zero offset	miniOffset	31.03.2025
Complex tools for device simulation	KTB	31.03.2025
Emitters with color	StraMiFa	28.02.2025
New refractive index sensor	NBZ	28.02.2025
Drucksensor für Ultra-Höchstdruck-Anwendungen	DS-NEMO	31.01.2025
Inkjet printing galvanically amplified infrared emitter	IJP-IR	31.12.2024
Fast infrared emitter array	FIRE	31.12.2024
High pressure sensor with flush media connection	DS300MPa	31.12.2024
Optimization of Thermal Behavior	OTB	30.09.2024
Simulation and design of quantum electronics and quantum processors	SiDQuP	31.08.2024
Highly integrated and scalable interface circuits for quantum processors	HIQuB	31.08.2024
Sensors for belt tension monitoring	ZugKraftSensor	31.07.2024
Vital Monitoring - BDMon / In-Ear Sensor for Non-Invasive Beat-to-Beat Blood Pressure Monitoring	BDMon	30.06.2024
Resonant silicon differential pressure sensors	ReSi-DDS	30.04.2024
Micro thermopile line	MyTZe	31.03.2024
New optical particle counter for large volumes	NewPARZ	29.02.2024
Gas detection based on absorbers integrated in thermopiles	PhIR-10	31.01.2024
Development of an ammonia sensor system for use in stationary inline measurement of ammonia content and a signal amplification option as well as a temperature management system with associated gas separator for optimum measurement conditions	AmmoniaSense	31.12.2023
Quantum HUB Thuringia	Quantum HUB Thüringen	31.12.2023
High End Accelerometers	HEB	31.08.2023
Novel isothermal sensor through front cavities	NIVo	31.07.2023
Photoacoustic gas sensor with reference gas sensor	PAS	31.07.2023
Development of a hardness measuring head based on a novel combined force-displacement sensor with a resolution of 100pm to determine the hardness of surfaces in the nanometer range	NanoSense	31.07.2023
Development of very flat 3D force sensors incl. evaluation electronics and suitable software solutions for a new tactile gripping system with innovative force feedback control for use in disarming robots	Tactile Gripper	30.06.2023
Components and modules for improved optical diagnostics	KODIAK	30.06.2023
High-sensitivity low-noise blue-violet APD	BVAPD	31.05.2023
Efficient coupling optics for single photon detectors	EkoPHo	30.04.2023
Development of innovative joining technologies for the construction of highly stable pressure transmitters	EFAH	31.03.2023
Redundant temperature measurement up to 300°C	Redundanz	31.03.2023
Improving the stability of hybrid silicon strain sensors	SiDMESES	28.02.2023
Optimized reactive bonding technology based on novel zirconium systems for use in microsystems technology	JoinZiSi	28.02.2023
Development of semitransparent optical sensors as components of micro- and optoelectronic systems	Tandemdiode	31.12.2022
Scaling of microsensors in nanometer range	SkaMiNa	31.10.2022
Micro optical leveling sensor	Moni	31.10.2022
Polycrystalline silicon as a functional layer in microsystems technology	PoSiMi	31.10.2022
Mounting stress-resistant pressure sensor chips	MoDru	30.09.2022
Freezing out	Freezing out	30.09.2022
Galvanically isolated incremental sensor	GalGIS	30.09.2022
Platform for SiCer compatible Si sensor technology	SiCer-SST	31.08.2022
Next generation pressure sensors with SiCer technology	DS-SiCer	31.08.2022
NDUV Ammonia gas sensor	NH3SENS	30.06.2022
Development of a miniaturized photodiode sensor to detect solar intensity and angle for integration into window glass modules and facades for real-time control of blackout elements	Light Control	30.06.2022
Implantable silicon dosimeter	SiDo	30.06.2022
Photodiodes without back reflection	PoRr	30.06.2022
Development of a high-precision flush-mounted sensor with shortened detection time	ALPHIN	31.05.2022
Standardizations in the production and processing of quantum materials using the example of NV color centers in diamond for the realization of a high-precision amperemeter diamond for electron detection based on quantum effects	DiaQuantFab	14.05.2022
Thermal decoupling for high temperature sensor technology	ThEK	30.04.2022
High-precision piezoresistive angular rate sensor for autonomous offline navigation	Gyros	30.04.2022
Development of a high-accuracy, form-fit-assisted flip-chip thermocompression process	smartbond	31.03.2022
High Performance Wafer-Level Packaging for Industrial Sensors	HPPI	31.03.2022
Si detectors with flat entrance window	DefEin	31.03.2022
Development of Temperature Compensated Silicon Strain Gauge Sensors	TKompDMS	31.03.2022
Development of a coupling of optical and semiconductor-physical simulation environment using the example of a sensor network for beam position detection in laser material processing systems	KOptHL	28.02.2022
Methods for optimal design of sensor networks and integration in context models	MESNW	28.02.2022
Defect engineering to increase the beam hardness of low gain avalanche detectors	DELGAD	28.02.2022
CMOS-compatible thermopile infrared sensor arrays	TPA	28.02.2022
Low Gain Avalanche Detectors for Steeling with Low Penetration Depth in Silicon	UV-LGAD	28.02.2022
Textured Blackbody MEMS IR Illuminator	TeSIS	31.01.2022
Electrolysis system components for highly dynamic/intermittent operation TP2 Moisture as a controlled variable	ElyKon	31.12.2021
Electromigration reduction of infrared emitters	EMIR	31.12.2021
Pressure sensor made of <110> silicon increased linearity	DS<110>	31.12.2021
Shade-free UV illumination with UVLEDs	VUVB (ValEndUV)	31.12.2021
Novel hydrogen sensor with highest sensitivity and selectivity based on micro-electro-mechanical sensor structures	H2MEMS	31.12.2021
Sensor development for negative pressure, elevated temperatures and media contact	Pedro	30.11.2021
Quantum mechanical calculation of electronic parameters	QMEMS	30.09.2021
Long-term stable micro-macro coupling to build ultra-flat silicon strain sensors for macroscopic test specimens	Mikado	30.09.2021
Diamond for electron detection	DIAED	30.09.2021
Fast infrared sensor with integrated optics	Sirio	31.08.2021
MEMS Gravimeter	M-Gravi	30.06.2021
Integrated reflectors for MEMS IR emitters	IReMIS	30.06.2021
UV LEDs with optimized light extraction due to adapted encapsulation technology	Olavv	31.05.2021
Photonic crystals for IR gas analysis	PhiR	30.04.2021
Silicon detector for electrons with energy 1keV	SiekeV	30.04.2021
Measurement routines and optical tests for radiation sensors	MuT	30.04.2021
Temperature-dependent investigation of IU characteristics on SOI diodes	Polytemp	28.02.2021
Analog, integrated temperature compensation for high temperature applications	AnITHA	28.02.2021
Flip chip assembly for building pressure sensors	Flip-Chip-DDS	31.01.2021
Radon detector built with silicon alpha particle sensors	ALPIN	31.12.2020
Screw Fixing Monitoring	Screw Fixing Monitoring	31.12.2020
Determination of the operating force of fasteners	BAVI	31.11.2020
Integrated drive circuit for high power UV source Source with integrated optics	HL-UV-IV (IC4UV)	30.11.2020
Temperature-dependent investigation of IU characteristics on SOI diodes	Platina	31.10.2020
Long-term stable passivation of piezoresistive sensors for demanding sensor environments	PassDru	30.06.2020
Thickness double metallization	DiDoMet	30.04.2020
Doppelseitige, großflächig gedünnte Strahlungsdetektoren	DLAT	31.03.2020
Temperature-dependent charge carrier properties	TeLa	31.03.2020
3D detector development	TRIDENT	31.03.2020
Multiphysical sensor for harsh environmental conditions	Bat	30.03.2020
Investigation of long-term stable joints for the assembly of pressure sensors for process monitoring in electrolyzers and system storage tanks	HyProS-D	30.03.2020
Fiber-Chip-Package	FCP	31.01.2020
Multilayer structures for chemically resistant, long-term stable sensor technology	MARLen	31.01.2020
Expansion of the microassembly center for the development of application-specific UV LED modules	UV-MMC	31.12.2019
Smart Sensor Technologies and Training for Radiation Enhanced Applications and Measurements	STREAM	31.12.2019
Smart, highly miniaturized fluorimeter	SmartFLU	31.12.2019
Actuator-based miniature spectrometer for gas sensor technology	AMiGa	31.12.2019
Targeted growth of synthetic diamond coatings for pressure sensors	GeWaDiS	31.10.2019
High temperature sensor technology	HotSens	31.10.2019
Touch probe with greatly reduced probing force for determining the instrumented indentation hardness	TARZAN	31.10.2019
Evaluation of printable material systems for IR emitters	DruMa4IR	30.09.2019
Electromigration in sensor contact systems	EMIC	30.09.2019
Miniaturized InfraRed Emitter Chip	MIREC	30.09.2019
Development of a UV-LED absorption sensor for the determination of nucleic acid content and purity	ENiN	31.08.2019
Controlled defect dynamics in silicon for improved UV stability	GeDeSi	31.08.2019
Sensor for Heat Radiation	SHeRa	31.08.2019
Development of a wafer-level package for UV LEDs based on multifunctional silicon and ceramic submounts	WLP-Mount	31.07.2019
Innovative chip-to-chip connections for high-end system requirements	I2CON	31.07.2019
Pressure sensor chip, insensitive to time change of mechanical properties of the assembly and mounting technology	DumBo	30.06.2019
Miniaturized pressure sensor for a pressure range smaller than 10 mbar	mini10	30.06.2019
Development of a bonding process for innovative reactive systems with a focus on a laser-based ignition technology, industrial reliability and process safety.	RNFSys	31.05.2019
Highly integrated optical disposable measuring cells with spectrophotometric measurement technology for online measurement of biological parameters	BioFlowCell	31.05.2019
Development of a production-optimized integrated high-power UV emitter	Monta-PHOS	30.04.2019
Resonant pressure sensor: Sensor that has a structure that measurably changes its resonant frequency when the external pressure is varied	Resonanter Drucksensor	30.04.2019
Micro-Structure Transformation of Silicon	MSTS	30.04.2019
EUV irradiance via diamond-coated temperature sensors	DiaTemp	28.02.2019
Intelligent development environment for flexible and fast microsensor prototyping (II)	IESP	31.01.2019
AC bridge	AC-Brücke	30.11.2018
Glowing Body Silicon Emitter	GloBSiE	30.11.2018
Integrated piezoresistive silicon force sensors	INKA	30.11.2018
Planarized wafer level packaging for hermetically sealed microsensors	PlanWLP	30.09.2018
Feedback-free direct assembly of MEMS sensors	RUDIS	31.08.2018
Development of multi-lambda UV emitters with adapted optical elements and optimized assembly and connection technology	Multi-Lambda-UV	31.07.2018
Technological Sensor Optimisation of Radiation Detectors	TENSOR	30.06.2018
High-resolution modular spectro-polarimeter using advanced semiconductor processes	SpektroPol	28.02.2018
Intelligente Systemintegration/Smart Access to Manufacturing für die Systemintegration	Smarter-SI	31.01.2018
Intelligent development environment for flexible and fast microsensor prototyping	Intelligente Entwicklungsumgebung	31.01.2018
Single-component sensor-actuator transducer with hybrid-integrated error compensation	BioSAM	31.12.2017
Assembly and packaging technology of miniaturized, silicon-based strain measurement sensors	SiStGAP	31.12.2017
Energy efficiency measures	Energieeffizienz	31.12.2017
Development of low-cost silicon substrates based on screen printing technology for local doping and metallization	SiSi	30.11.2017
Development of a CMOS-compatible thermopile infrared sensor for gas detection	TPS	31.10.2017
FEM4MEMS - multi-physics finite element simulator for MEMS design	FEM4MEMS	30.09.2017
Development of defect engineering processes in p-type silicon for fabrication of high-impedance n-in-p silicon detectors	DeSiD	31.08.2017
Large area diluted radiation detectors	LAT	31.07.2017
Optically readable pressure and temperature sensor	ODTS	31.07.2017
Production-oriented introduction of a bonding process using integrated reactive metal layers	iRMS	31.07.2017
System-in-Package for a miniaturized gas sensor up to 200 °C / Hermetic package of IR modules	SiPamiG-200	31.07.2017
Model-based process control of biogas plants Subproject 2: Sensor technology	MOST	30.06.2017
Media-resistant differential pressure sensor	MeReDiD	31.05.2017
Modular microprobe systems	MMS	31.05.2017
Thin silicon diaphragm for highly stable and highly accurate silicon pressure sensors	dSiM	31.05.2017
Multifotodiode with multiple three-dimensionally delimited active areas for high resolutions and temperatures	MuFoDi	31.05.2017
Diamond and Silicon UV-Vis Hybrid Sensor	UVPD	31.05.2017
Single Photon Detector	Single Photon Detector	31.05.2017
Miniaturized fluorimeter	MiniFLU	30.04.2017
Black Silicon	Black Silicon	30.04.2017
Development of a sensor system for controlling and increasing the moisture protection of internally insulated exterior wall constructions with a thermovariable inner layer	SensorTex	28.02.2017
Innovation Forum SmartDiamonds - A regional network for the promotion of innovative functional diamond coatings in microsensor technology	Smart Diamonds	28.02.2017
Careers in high-radiation Environment Technologies: Planar pixel sensor development for high-resolution imaging and particle physics	Talent	31.12.2016
Direction sensitive quadrant detector	RiSeQ	31.12.2016
Polarization compensated 3D spectral sensors	3D-SpekSens	31.12.2016
PIEZO - Calculation and Verification of Piezo Coefficients in Pressure Sensor Design Flow	PIEZO	31.12.2016
Separating diaphragm	NanoKAP	31.12.2016
New solderable metallization processes in the submicrometer range for pixel detectors	µPixSol	31.12.2016
Innovative start metallizations for solderable microcontacts	ISaBel	31.12.2016
Microchannel cooling	Mikrokanalkühlung	31.12.2016
Differential pressure sensors resistant to overload	ÜLaDru	31.12.2016
3D micro force sensor for quality assurance and tactile surfaces	3D-Kraftsensor	31.12.2016
Radiation resistant relative humidity sensor	SRF	31.12.2016
Micro Laser Doppler Sensor	MiLD	31.12.2016
Lighting unit with integrated stabilization	Belis	31.12.2016
Active Edges for Silicon Sensors	Active Edges	31.12.2016
Defect engineering in silicon for the optimization of sensor properties	SiPlus	31.12.2016
Capillary for continuous glucose monitoring	µKAP	30.09.2016
Development of a calibration chamber and/or sterilization chamber for substance sensors	Kalika	31.08.2016