High End Accelerometers
| German title: | High End Beschleunigungssensoren | |
| Acronym: | HEB | |
| Duration: | 1st April 2021 - 31st August 2023 | |
| Description: | The project deals with the development of very high-resolution capacitive acceleration sensors. Statically operated inclination sensors with a resolution of 0.001⁰ are targeted as a demonstrator design. For this purpose, concepts from basic research are taken up and implemented in cost-efficient wafer-level processes. The main features are a significantly increased seismic mass, a laterally arranged differential capacitor, and a hermetic package. | |
| Funded by: | BMWI |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49VF200064 | |
News articles about HEB: | ||
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CiS Forschungsinstitut for the first time at SEMICON in Munich 5. November 2024 |
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Highlights of Sensor+Test 2024 in Nuremberg 30. May 2024 |
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Highlight of the CiS Forschungsinstitut at the Hannover Messe 2024: Galvanically isolated incremental sensor 18. April 2024 |
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Start for new preliminary research project 22. June 2021 |
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