Development of low-cost silicon substrates based on screen printing technology for local doping and metallization
| German title: | Entwicklung von preiswerten Silizium-Trägern auf Basis der Siebdrucktechnologie für lokale Dotierungen und Metallisierungen | |
| Acronym: | SiSi | |
| Duration: | 1st August 2015 - 30th November 2017 | |
| Description: | Based on existing technology know-how from the photovoltaic sector, screen printing of metal-containing pastes and dopants was adapted to the requirements of microsystem technology and microsensor technology. Using two selected demonstrators as examples, it was shown that screen printing can be used to create Si carriers with circuit functions. Similarly, screen-printed local dopants on silicon wafers allow the realization of silicon strain gauges in a very cost-effective manner. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF150021 | |
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