Targeted growth of synthetic diamond coatings for pressure sensors
| German title: | Gezieltes Wachstum synthetischer Diamant-Schichten für Drucksensoren | |
| Acronym: | GeWaDiS | |
| Duration: | 1st May 2017 - 31st October 2019 | |
| Description: | Pressure sensors with a passivation of synthetic diamond are particularly resistant to media. In the project, the efficient production of the diamond layer was tested using simple, innovative technologies adapted from other areas of microsystems technology. Diamond layers were synthesized only in the technically relevant sensor areas. Seed crystals were selectively deposited in relevant sensor areas. Performance advantages of the sensors can now be realized without cost-intensive technologies. |
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| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF160181 | |
| Contact: | Contact us about this project via our former business unit Silicon Detectors | |
News articles about GeWaDiS: | ||
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Hasselt Diamond Workshop 2022 – SBDD XXVI with participation of the CiS Research Institute 3. March 2022 |
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GeWaDiS – Targeted growth of synthetic diamond layers for pressure sensors 6. May 2020 |
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