Resonant pressure sensor: Sensor that has a structure that measurably changes its resonant frequency when the external pressure is varied
| German title: | Resonanter Drucksensor: Sensor, der eine Struktur besitzt, die ihre Resonanzfrequenz messbar verändert bei Variation des äußeren Druckes | |
| Acronym: | Resonanter Drucksensor | |
| Duration: | 1st November 2016 - 30th April 2019 | |
| Description: | Based on MEMS technologies, silicon-based pressure sensors for the range from a few mbar to one bar have been developed, which operate on the principle of resonant frequency. They exhibit high accuracy and at the same time are attractively priced due to well-structured process control. Characterization measurements, in particular of the resonant frequency of the excited mechanical structures, showed that the overall concept with thermal excitation and signal readout via a piezoresistive bridge exhibits high stability. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF150201 | |
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