FEM4MEMS - multi-physics finite element simulator for MEMS design
| German title: | FEM4MEMS - multi-physics Finite Elemente Simulator für MEMS-Design | |
| Acronym: | FEM4MEMS | |
| Duration: | 1st June 2015 - 30th September 2017 | |
| Description: | At CiS, finite element simulators are extensively used for sensor design. During the simulation of piezoresistive pressure sensors, there are repeatedly differences to the characteristic curves measured on realized sensors. One possible reason for this is the insufficient coupling between mechanical/thermal and electronic calculation of the piezoresistive resistance change. A highly stable FEM simulator developed at the TU Hamburg-Haarburg was applied to the fully coupled problem for the first time and the existing deficiencies were eliminated. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | VF140049 | |
News articles about FEM4MEMS: | ||
 |
MEMS design for highly stable and high-precision pressure sensors – CiS Forschungsinstitut für Mikrosensorik cooperates with TU Hamburg-Harburg 17. June 2016 |
|
« back to project overview
