EUV irradiance via diamond-coated temperature sensors
| German title: | EUV-Bestrahlungsstärke über diamantbeschichtete Temperatursensoren | |
| Acronym: | DiaTemp | |
| Duration: | 1st September 2016 - 28th February 2019 | |
| Description: | The aim was to develop a low-cost detector platform for EUV radiation that can be manufactured using CMOS/MEMS-compatible processes and consists of a diamond absorber and a silicon temperature sensor. It was exploited that the absorption of EUV radiation in the radiation-hard synthesized diamond layer leads to heating and is directly detected in the temperature sensor due to the very good thermal conduction. This allows the EUV radiation intensity to be determined via a silicon thermal sensor. This indirect method allows the detection of shortest wavelengths with a low-cost and long-term stable setup. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF150194 | |
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