Ultra-small pressure sensors based on MSTS diaphragms
| German title: | Ultrakleine Drucksensoren auf der Basis von MSTS-Membranen | |
| Acronym: | UDM | |
| Duration: | 1st July 2024 - 31st December 2026 | |
| Description: | The aim of the project is the development and prototype production of piezoresistive absolute pressure sensors with ultra-small dimensions, yet very high sensitivities based on single-crystal MSTS membranes. The MSTS membrane technology was developed in a preliminary project and is now being optimized and expanded into customer-specific sensor applications. For example, a 1 bar chip with edge lengths of 500 µm can resolve around 1 Pa, which corresponds to a height difference of approx. 10 cm. | |
| Funded by: | Federal Ministry of Economic Affairs and Climate Action |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF230075 | |
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