MEMS Pirani sensor for fine and high vacuum
| German title: | MEMS Pirani Sensor für das Fein- und Hochvakuum | |
| Acronym: | MinerVa | |
| Duration: | 1st March 2024 - 31st August 2026 | |
| Description: | The aim of the project is to develop a sensor measurement system for monitoring the pressure of vacuum-carrying processes. The core elements are the development of a media-resistant, high-temperature capable, miniaturized and cost-efficient MEMS Pirani sensor with a maximum operating temperature of 300°C and a measuring range of 1E-05 mbar to 1 mbar (fine and high vacuum). The sensor measuring system is to be constructed as a sandwich and applied to a heatable ceramic substrate. | |
| Funded by: | Federal Ministry of Economic Affairs and Climate Action |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF230007 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about MinerVa: | ||
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MEMS Pirani sensor for fine and high vacuum 4. April 2024 |
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