PIEZO - Calculation and Verification of Piezo Coefficients in Pressure Sensor Design Flow
| German title: | PIEZO - Berechnung und Verifikation von Piezokoeffizienten im Drucksensor-Design-Flow | |
| Acronym: | PIEZO | |
| Duration: | 1st July 2014 - 31st December 2016 | |
| Description: | At CiS, semiconductor physics simulation tools are extensively used for the design of sensors. During the characteristic curve calculation of piezoresistive resistance bridges, there are repeated differences to the characteristic curves measured on the realized components. One possible reason for this is the use of global piezoresistive constants over the highly inhomogeneous mechanical stress field in which the resistors are located. By means of a local quantum mechanical determination of these piezo-constants, this cause of error was evaluated and eliminated. The project result can be used to generate sensor models that reproduce measured characteristic curves in a physically meaningful way or enable a targeted prediction of the sensor behavior. |
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| Markets: | Metrology, Automation | |
| Contact: | Contact us about this project via our business unit MEMS | |
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