Temperature-dependent investigation of IU characteristics on SOI diodes
| German title: | Temperaturabhängige Untersuchung von IU-Kennlinien an SOI-Dioden | |
| Acronym: | Platina | |
| Duration: | 1st May 2018 - 31st October 2020 | |
| Description: | The aim of the project was to develop platinum-based coating technologies as inert protective layers and temperature-stable contact layers for selected sensor demonstrators from the MEMS field. Various technological approaches such as platinum electroplating and screen and stencil printing of platinum paste were investigated for their suitability in relation to specific applications. Another important motivation was the maximum application temperature. In sensors, this is often limited by the electrical contact materials. A higher temperature resistance was achieved by modifying the contact systems. |
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| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49VF170042 | |
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