Photonic crystals for IR gas analysis
German title: | Photonische Kristalle für IR-Gasanalyse | |
Acronym: | PhiR | |
Duration: | 1st November 2018 - 30th April 2021 | |
Description: | The focus was on the development of a gas measurement system based on photonic crystals. The decisive advantage of the solution is that these special wavelength-selective filters can also be implemented directly as part of the elementary assemblies of NDIR sensors - namely IR emitters and/or IR detectors. This requires only an additional patterning process during wafer processing of the semiconductor devices. Complex multilayer systems (as in established interference filters) and associated technological challenges due to thermomechanical stresses during chip operation can be avoided. This enables more compact and cost-effective systems. |
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Funded by: | BMWI | |
Project sponsor: | EuroNorm GmbH | |
Funding code: | 49MF180072 | |
Contact: | Contact us about this project via our business unit MOEMS | |
News articles about PhiR: | ||
CiS Research Institute at the microTEC Südwest Cluster Conference 2022 16. May 2022 |
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