Large area diluted radiation detectors
German title: | Großflächig gedünnte Strahlungsdetektoren | |
Acronym: | LAT | |
Duration: | 1st April 2015 - 31st July 2017 | |
Description: | Within the scope of this project, large-area radiation detectors were developed whose active area was thinned to a thickness of at least 100µm. Such sensors with active areas of up to 4x4cm² could be successfully produced, tested and evaluated. The electrical as well as mechanical parameters meet all specifications and show no significant degradation compared to those of conventional, unthinned sensors. Compared to the standard process with handling wafers, the method of wet chemical cavity etching is an interesting alternative. Continuous optimization of the process will yield further cost advantages. |
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Funded by: | BMWI | |
Project sponsor: | EuroNorm GmbH | |
Funding code: | MF140163 | |
Contact: | Contact us about this project via our former business unit Silicon Detectors | |
News articles about LAT: | ||
With thin pixel radiation detectors close to the collision point 29. April 2016 |
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