Electromigration reduction of infrared emitters
| German title: | Elektromigrationsverringerung von Infrarotemittern | |
| Acronym: | EMIR | |
| Duration: | 1st July 2019 - 31st December 2021 | |
| Description: | The aim of the project is to investigate the technology platform for infrared emitters established at the CiS Research Institute with regard to service life and electromigration effects. Based on the findings on electromigration effects under different operating conditions, an optimized, electron migration-independent technology platform for infrared emitters will be developed and tested on the basis of demonstrators. After evaluation of the current state, design and process parameters for the optimized technology platform will be determined, which allow to improve the lifetime of the infrared emitters and to reduce the electromigration in the infrared emitters without causing a significant degradation of the optical parameters. Based on this, demonstrators of infrared emitters with the optimized design and process parameters will be fabricated and analyzed in the project. By using a suitable metallization system and adjusting design and process parameters as well as the adaptation and embedding material system of the active MoSi2 heating layers, the electromigration of the thin film and electrical contacts, the migration shall be reduced and thus the lifetime of the infrared emitter shall be significantly increased. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF190017 | |
| Contact: | Contact us about this project via our business unit MOEMS | |
News articles about EMIR: | ||
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Trade Fair Sensor+Test and Congress SMSI 30. April 2021 |
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