Actuator-based miniature spectrometer for gas sensor technology
| German title: | Aktorisches Miniaturspektrometer für die Gassensorik | |
| Acronym: | AMiGa | |
| Duration: | 1st July 2017 - 31st December 2019 | |
| Description: | A compact sensor design was developed for the detection of a continuous infrared spectrum over further wavelength ranges. The envisaged sensor offers a significantly larger measurable spectral range than other solutions such as tunable Fabry-Perot filters. In addition, the compact design of the finished sensor system clearly sets it apart from established Michelson FTIR. With such a setup it is possible to analyze different gases and gas mixtures with only one sensor and to integrate it into systems due to its compact design and comparatively low-cost manufacturability. The costs are comparable to established Fabry-Perot filters despite the extended range of functions. The most important features at a glance: Compact dimensions (miniaturization) / Hermetically sealed / High integration potential (in complex systems) / Wide measurable spectral range / Analysis of different gases and gas mixtures possible / Fabrication/assembly at wafer level / Cost reduction. | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | 49MF170005 | |
| Contact: | Contact us about this project via our business unit MOEMS | |
« back to project overview
