Thin silicon diaphragm for highly stable and highly accurate silicon pressure sensors
| German title: | Dünne Silizium Membrane für hochstabile und hochgenaue Silizium-Drucksensoren | |
| Acronym: | dSiM | |
| Duration: | 1st February 2015 - 31st May 2017 | |
| Description: | The CiS Research Institute has become a major developer and supplier of highly stable and accurate silicon pressure sensors for globally operating German pressure measurement technology companies. Users are increasingly demanding smaller, more precise and more stable sensors. This is also associated with a reduction in lateral diaphragm dimensions and, inevitably, a reduction in diaphragm thickness in order to maintain pressure sensor characteristics, especially pressure range and sensitivity. Other characteristics and sensor properties such as linearity, burst pressure and long-term stability are also to be ensured with the reduction of lateral diaphragm dimensions and diaphragm thickness. For this purpose, 3 technological approaches for the preparation of thinner membranes with 7, 11 and 15µm thickness for piezoresistive pressure sensors have been successfully tested. As a result of the evaluation of these preparations, it can be stated that these thicknesses can be produced with reasonable technological effort and sufficient homogeneity. It was also recognized that the linearity of the characteristic curve becomes increasingly problematic with decreasing diaphragm thickness and requires further investigation. |
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| Markets: | Metrology, Automation | |
| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF140125 | |
| Contact: | Contact us about this project via our business unit MEMS | |
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