Piezo-junction effect based on-chip multi-sensors
| German title: | Piezo-junction-Effekt basierte on-chip Multi-Sensoren | |
| Acronym: | PJS | |
| Duration: | 1st April 2023 - 30th September 2025 | |
| Description: | The project "Piezo-junction effect based on-chip multi-sensors" for silicon MEMS will investigate the effects of environmental influences on differently designed pn junctions or more complex bipolar lateral and vertical on-chip silicon structures. Ways to detect several of these influences will be found using different combinations of semiconductor fabrication processes ("technology") and lateral bipolar components ("layout"). For a better separation of different effects, the main and the cross sensitivities are to be analyzed. The piezojunction effect is based on the effect of stress mechanically introduced into the silicon crystal on the charge carriers. |
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| Funded by: | Federal Ministry of Economic Affairs and Climate Action |  |
| Project sponsor: | Euronorm | |
| Funding code: | 49MF220217 | |
| Contact: | Contact us about this project via our business unit MEMS | |
News articles about PJS: | ||
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Piezo-junction effect based on-chip multi-sensors 13. July 2023 |
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