Miniaturized pressure sensor for a pressure range smaller than 10 mbar
| German title: | Miniaturisierter Drucksensor für einen Druckbereich kleiner 10 mbar | |
| Acronym: | mini10 | |
| Duration: | 1st February 2017 - 30th June 2019 | |
| Description: | The development of an extremely small (miniaturized) pressure sensor for a measuring range smaller than 10 mbar (mini10) requires new technological principles in membrane development. The aim was to develop a technology platform for piezoresistive pressure sensors in the low-pressure range, with the same requirements in terms of sensitivity, drift behavior and long-term stability as well as overpressure resistance. At the same time, these sensors will be geometrically significantly smaller and thus also more cost-effective due to a larger number of units per wafer. The investigations concentrated mainly on silicon oxide and silicon nitride membranes. Extensive preliminary investigations were carried out by means of simulations, and various measurement methods were used to gain a better understanding of the membrane properties. In addition to an exact design, a further focus was on the development of the supply and connection lines of the resistors. These are made of structured and implanted silicon and are designed to influence the measurement signal as little as possible. Due to the small dimensions of the sensors, the bond pads were also optimized so that they are large enough for the bonding technology and do not restrict the functionality of the membrane. |
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| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF160063 | |
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