Optically readable pressure and temperature sensor
| German title: | Optisch auslesbarer Druck- und Temperatursensor | |
| Acronym: | ODTS | |
| Duration: | 1st February 2015 - 31st July 2017 | |
| Description: | The aim of the project was to develop silicon structures with which an electrically, spatially and thermally decoupled optically readable temperature and pressure measurement can be carried out under difficult conditions of electromagnetic compatibility. For this purpose, the coupling is exclusively via optical fiber and the sensor element consists only of glass and silicon. Apart from light, no energy is coupled into the measurement medium, nor can the sensor be disturbed by electromagnetic waves. The main focus of development was the integration of optical pressure and temperature measurement on the sensor side and of static and dynamic evaluation of the signals in the evaluation unit. Complex 3D structures were developed and realized by multi-level structuring as well as a chip stack technology and an interferometer arrangement together with signal evaluation. |
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| Funded by: | BMWI |  |
| Project sponsor: | EuroNorm GmbH | |
| Funding code: | MF140096 | |
| Contact: | Contact us about this project via our business unit MEMS | |
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