Scaling of microsensors in nanometer range
| German title: | Skalierung von Mikrosensoren in Nanometerbereich | |
| Acronym: | SkaMiNa | |
| Duration: | 1st May 2020 - 31st October 2022 | |
| Description: | The focus is on the electrical characterization of flat pn junctions in silicon for applications in the field of microsystems technology on thin membranes of pressure sensors or radiation detectors. For this purpose, polycrystalline silicon is deposited on silicon wafers with subsequent ion implantation and diffusion step. The polysilicon layer thus acts as a dopant reservoir during the diffusion process to generate defect-free flat pn junctions. | |
| Funded by: | BMWI |  |
| Project sponsor: | Euronorm | |
| Funding code: | VF200008 | |
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