The new BerNieDru research project aims to develop pressure sensors that are sensitive in a pressure range of 1-2 mbar. These ultra-low pressure sensors are used, for example, in medical technology, heating, ventilation and air conditioning technology, heat pumps and in the field of environmental monitoring. The measuring range places high demands on the sensitivity and durability of the sensors. Sensors available on the market generally have very low burst pressures, which can lead to problems in the areas of application and in the manufacture of the sensors.
The project team at the CiS Research Institute, which consists of specialists in silicon-based MEMS sensors, has opted for the piezoresistive measuring principle for these sensors. The basis here is a membrane that bends when pressure is applied. By adapting the membrane geometry, an improved burst pressure is to be achieved and at the same time a high sensitivity of the sensors is to be guaranteed. In order to achieve this goal, extensive simulations are necessary and a suitable manufacturing technology must be developed.
The research and development work described was funded by the Federal Ministry of Economic Affairs and Climate Action (BMWK) as part of the “Burst-proof low pressure sensor” (BerNieDru) research project.
Funding code: 49MF 230066
