MEMS infrared emitters enable high miniaturization, high dynamics and are also cost-effective. Commercially available infrared emitters usually consist of metal layers (predominantly platinum) that are embedded in a dielectric membrane system with a membrane thickness of a few nm to µm and enable temperatures of up to 900°C in the center of the membrane as a resistive heating layer.
The layer system of the simple emitter types is usually not optically tight, so that interference effects can occur within the layer system and the surface emissivity in the mid-IR spectral range is low. An increase in optical output power can be achieved with an additional layer, which must also withstand many temperature cycles from room temperature to 900°C.
In the newly launched CNT-IR project, carbon nanotubes are to be used to increase the emission of the IR emitter while maintaining the same electrical output.
The research and development work described is funded by the Federal Ministry of Economic Affairs and Climate Action (BMWK) in the research project “Infrared emitters with an emission-improving layer of carbon nanotubes” (CNT-IR).
Funding code: 49MF230047
