
Micro Laser Doppler Sensors for Blood Flow Measurements
/in Medical technology, MOEMSThe CiS Research Institute starts developments on a miniaturized optical sensor for investigations of blood flow velocity in the skin. The sensor principle is based on the laser Doppler method. Here, elastic scattering at the moving blood components causes a shift of the light wavelength, which becomes measurable by coherent superposition with the excitation light
Customized piezoresistive micro scanners
/in Force, MEMSThe CiS Research Institute is developing various miniaturized probes made of single-crystalline silicon with integrated piezoresistive measuring bridge for fast inline quality control of components made of a wide range of materials. High sampling rates are made possible by a very low probing force, a high natural frequency (3…5 kHz), and a very small mass (≈0.1 mg)
Optical microsensors for measuring pulse contour and heart rate variability
/in Events, Medical technology, MOEMSCiS Research Institute presents multispectral photoplethysmography sensors for applications in pain therapy at SENSOR+TEST 2015.
A mobile biofeedback system that records vital parameters of the patient measured in the external auditory canal and processes them further with the help of a smartphone app.
Miniaturized silicon strain elements
/in Force, Medical technology, MEMS, PackagingFor precision force measurements in medical technology applications, the CiS Research Institute from Erfurt, Germany, has developed silicon strain gages (Si strain gages) with integrated measuring bridge. By using semiconductor technologies, a higher long-term stability, precision and measurement reliability is achieved compared to ductile metal strain gages
Micro laser illumination for analytics
/in Analytics, MOEMS, WaferprocessingThe CiS Research Institute is showing a micro-laser illumination for analytics at the Sensor+Test trade fair: Laser light has special properties. Its beam can be guided narrowly over long distances and its spectrum is very pure. These properties are made usable for small sensors with the micro-laser illumination
Piezoresistive high temperature pressure transducer cores
/in MEMS, Packaging, PressureHigh-precision process measurement technology is facing new challenges with operating temperatures of up to 300°C. Plant and measurement technology producers want to use MEMS-based pressure transducer cores to open up functional extensions and new design spaces.
The CiS Research Institute in Erfurt has now developed the appropriate microsystem technologies for this purpose
Thuringia participates in European network for the production of smart systems
/in MEMS, MOEMSThe EU project SMARTER-SI aims to offer a novel manufacturing platform for microsystems throughout Europe, on which innovative and intelligent sensor systems can be produced cost-effectively in small and medium quantities. Special technologies for the production of mechanical and optical sensors made of silicon, in short MEMS and MOEMS, come from the CiS Research Institute
Compact refractive index and film thickness sensor
/in Events, MOEMSQuality assessment and process control are important tools in the production of high-quality products. In surface coating, it is necessary to determine essential properties of the applied coatings. This includes the layer thickness and the refractive index.
The compact sensor developed at the CiS Research Institute measures the polarization-dependent reflection of two different single-mode lasers at inclined angles of incidence
Cooperation between CiS Forschungsinstitut GmbH and Yokohama National University in Japan
/in PersonnelDr Thomas Ortlepp takes over the newly created Chair of Sensor Technology and Energy Efficient Microelectronics at Yokohama National University in Japan
CiS Forschungsinstitut für Mikrosensorik GmbH founding member of the German industrial research association “Konrad-Zuse e.V.”
/in CiS generalThis important alliance creates for the first time a joint platform for the industry-related non-university research partners of SMEs