
H2MEMS – Novel hydrogen sensor with highest sensitivity and selectivity based on silicon-based MEMS sensor structures
/in Energy, MEMS, PressureAs a specialist in the development of silicon-based pressure sensors, the CiS Research Institute is developing and testing palladium-coated MEMS structures with its partners in the H2MEMS project. The volume expansion of palladium during hydrogen deposition is being tested as a measuring principle
SPIE Photonics West 2021 as an online event
/in Events, MOEMS, Photonic, UVSPIE Photonics West 2021 will take place from March 6 to 11 as an online-only event. As part of OPTO 2021, the CiS Research Institute will give two presentations on current research results on the emission behavior of UV LEDs and on down converters for driving UV LEDs. The lectures are available for registered participants during the whole period of the event
NanoSense – Development of a hardness measuring head based on a novel combined force-displacement sensor
/in Force, MEMSFor the determination of surface hardness in the nanometer range, a new measuring head combining a force and displacement sensor is being developed in the recently launched “NanoSense” project. It is to be connected modularly to common universal testing machines and XY-axis manipulators
Webinar with Live Demo: Silicon-based Piezoresistive Force Sensors
/in Events, Force, MEMS, PackagingMEMS-based piezoresistive force sensors can be used to monitor preload forces or contact forces. Our webinar will go into the technical basics of such sensors and we will show you some demonstrators of silicon strain gauges (Si strain gauges) developed by us
NIVo – Novel isothermal sensor through front cavities
/in MOEMS, PackagingThe market for thermopile sensors is growing and will continue to gain from the current COVID pandemic. In the current project NIVo two established principles are combined to a novel isothermal sensor by front cavities and thus the innovation capability in this field is further developed
AmmoniaSense – Development of an in-line measuring system using an innovative ammonia sensor
/in Energy, MEMSThe aim of the newly launched ZIM cooperation project AmmoniaSense is to record the ammonia concentration with a stationary inline measuring system in order to optimally control biogas plants. The CiS Research Institute is developing the ammonia sensor system, which will be used in combination with a hydrogen sulphide sensor
Save the date – 9th Beam Telescopes and Test Beams Workshop
/in Silicon DetectorsAn overview lecture on silicon processing techniques will be given by Prof. Thomas Ortlepp at the “Beam Telescopes and Test Beams Workshop” on 8 February at 13:00. The online lecture will explain which types of silicon processing techniques exist and how they can be applied to the production of silicon radiation detectors
Ammonia gas sensor for AdBlu® control system
/in Automotive, Energy, MOEMS, UVAmmonia gas sensor for AdBlu® control – Spectroscopically operating sensor concepts sensitively and reliably select ammonia concentration in the exhaust tract of a diesel engine. In the NHxSens project, a miniaturised non-dispersive ultra-violet (NDUV) spectrometer is being developed for exhaust gas analysis
Innovative process and safety sensor technology for “green hydrogen”
/in Energy, MEMSThe German government’s National Hydrogen Strategy is a building block for a successful climate change and secure energy supply. As a development partner for application-specific silicon sensors, the CiS Research Institute is dedicated to the topic of “green hydrogen” in research projects. Cooperation on current research topics, including hydrogen, is bundled at the regional level by the FTVT
Long-term stable passivation of piezoresistive sensors for demanding sensor environments
/in MEMS, PressureDirect contact with the medium is difficult to implement for silicon-based microsensors. In order to fully exploit miniaturisation, corrosion protection is applied at chip level. This makes an application in more demanding environments possible even without additional protective constructions