Miniaturized, infrared-sensitive detectors are required for contact-free temperature measurements as well as imaging and spectroscopic applications in the spectral range from 1 to 15 µm. The MyTZe project focused on the development of miniaturized thermopiles, as individual elements and as thermopile lines, as well as the development of isothermal thermopiles. This refers to thermopiles whose output signal is not or only slightly dependent on the temperature and temperature distribution of the environment. For the isothermal principle, both the heat conduction and heat capacity of the various areas must be adapted and the absorption and reflection optimized.
First of all, thermal and optical simulations were carried out to determine which signal strengths can be achieved with different thermopile sizes. In addition, the effect of the frame temperature and its distribution on the isothermal thermopiles was simulated. The simulation results were then used to select and implement suitable designs and characterize the chips developed. The signals of the elements (pixels) of the segmented thermopiles could be determined individually. In addition, the extent of the influence of the technology on the characteristics of the thermopiles was determined and an ideal set of parameters was derived.
The research and development work described was funded by the Federal Ministry of Economic Affairs and Climate Action (BMWK) as part of the “Mikro-Thermopile-Zeile” (MyTZe) research project.
Funding code: 49MF210069
