The aim of the project launched is to significantly reduce the qualitative and quantitative temperature dependence of monocrystalline silicon strain gauge sensors (SiDMS) in a very wide temperature range from -40°C … 130°C. With silicon-based sensors, there is a clear dependence of the measured variable on the temperature. One influencing factor is the temperature dependence of the piezoresistive effect itself and the electrical resistance.
In the case of hybrid sensors such as Si strain sensors, joined with glass frit to a steel body, there is also the influence of thermally induced mechanical stresses due to the different temperature coefficients of the materials used. This particularly affects the volume expansion and the modulus of elasticity and thus a change in the mechanical properties. In the project, material combinations and geometries of the steel body and the SiDMS are cleverly linked in order to obtain only a minimal temperature dependence of the measurement signal.
The research and development work described was funded by the Federal Ministry of Economic Affairs and Climate Action (BMWK) in the research project “Reduction of thermal influences of crystalline Si-DMS” (Flunder).
Funding code: 49MF 230074
