The CiS Research Institute will present the results of the “SiDMeses” research project at the Innovation Day for SMEs in Berlin on 13th June 2024. The aim was to improve the stability of hybrid silicon strain sensors. The research work focused on minimizing assembly stresses and achieving high overload resistance. The silicon strain sensors (Si-DMS) developed have an integrated, very sensitive, strain-sensitive measuring bridge. They are 40 times more sensitive, show almost no creep effects and are virtually insensitive to transverse strain. Various assembly techniques such as glass solder were also investigated and optimized. The result is an innovative technology that compensates for mechanical stresses and enables very precise measurements in a wide range of applications from automation technology to the hydrogen industry.
Between 10:00 AM and 6:00 PM on 13th June 2024, visitors will have the opportunity to discuss the project results with Dr. Klaus Ettrich, Head of the MEMS Business Unit at our institute, to explore joint ideas or simply to get an overview of the innovative achievements of SMEs and their partners.
The Innovation Day is a public event organized by the Federal Ministry for Economic Affairs and Climate Protection and this year’s motto is: “This is how the future works!” Over 300 exhibitors will showcase their exhibits at the exhibition at Tschaikowskistraße 49 in Berlin-Pankow. Admission is free of charge.
The research and development work described was funded by the Federal Ministry of Economic Affairs and Climate Action (BMWK) in the research project “Improving the stability of hybrid silicon strain sensors” (SiDMeses).
Funding code: 49MF200061
