Silicon-based piezoresistive pressure sensors are often used microelectromechanical systems (MEMS) in industrial pressure measurement technology. For the development of piezoresistive pressure sensors, various simulation methods can be used to predict the interaction of the coupled physical domains of the sensor system. The increasing miniaturization as well as the constantly growing demands on sensitivity, long-term stability or the compensation of the temperature dependence of pressure sensors require precise predictions of the sensor characteristics under different operating conditions. An efficient design process is essential for minimizing the computational effort and thus saving costs and time in the development process.
The aim of the mMoDS research project is to describe the system model using modular sub-models in order to enable an efficient design process that takes into account different design variants and technological variants, thereby reducing the number of detailed, computationally intensive FEM simulations. In this way, the CiS Research Institute would also like to contribute to improving the carbon footprint.
The research and development work described was funded by the Federal Ministry of Economic Affairs and Climate Action (BMWK) as part of the “Modular models for piezoresistive pressure sensors” (mMoDS) research project.
Funding Code: 49VF230031
