Highlight of the CiS Forschungsinstitut at the Hannover Messe 2024: Galvanically isolated incremental sensor
During the Hannover Messe, which starts next week, the CiS Research Institute will be presenting an electrically isolated incremental sensor at the joint Thuringian stand in Hall 3, Stand D76. As part of the “GalGiS” funding project, new silicon technologies were developed to achieve such galvanic isolation at chip level.
Photodiode arrays with an integrated LED light source were developed as demonstrators, which achieve high dielectric strengths (up to 1500 V) at a distance of just 150 µm between the elements. The new technology guarantees the usual geometric accuracy in the sub-micrometer range. As a result, high-precision phase positions and signal ratios are realized reproducibly and with long-term stability and application-specific requirements are achieved.
The galvanic incremental sensor can be used in optical encoders for position and speed sensors – especially where high technical safety is required – for example in aerospace, rail transportation and medical technology.
» Infosheet: Galvanically isolated incremental sensor (GalGIS)
Infrared emitters with dynamic range greater than 100 Hz
Infrared MEMS emitters are powerful alternatives to classic light bulbs. These heat emitters can cover the spectral range from 2 to 15 µm and achieve dynamic modulations of up to 30 Hz. A recent development has even pushed the dynamic range beyond the 100 Hz limit.
One application for the fast infrared emitter array is in non-dispersive infrared spectroscopy (NDIR) for gas detection and concentration for medical and industrial applications.
» Infosheet: Fast infrared emitter array (FIRE)
Avalanche photodiode with enhanced blue and ultraviolet amplification
APDs are often used for the detection of weak light. Standard APDs have a peak sensitivity at wavelengths > 500 nm. The new BV-APD developed achieves excellent performance for UV and blue light with a spectral range of 250-700 nm and can be customized.
» Infosheet: Highly sensitive low-noise blue-violet avalanche photodiodes (BVAPD)
In addition to the portfolio of photodiodes, the CiS Research Institute will also be showing a selection of MEMS developments. These include:
» Infosheet: High-end acceleration sensors (HEB)
» Infosheet: Hybrid silicon strain sensors (SiDMeses)
» Infosheet: Retrofit kit for non-invasive pressure measurement (NivLer)
The research and development work described in the following research projects was funded by the Federal Ministry of Economic Affairs and Climate Action (BMWK):
Galvanically isolated incremental sensor (GalGIS)
Funding code: 49VF123456
Fast infrared emitter array (FIRE)
Funding code: 49MF220020
Highly sensitive low-noise blue-violet avalanche photodiodes (BVAPD)
Funding code: 49MF200098
High-end acceleration sensors (HEB)
Funding code: 49VF200064
Improving the stability of hybrid silicon strain sensors (SiDMeses)
Funding code: 49MF200061
Retrofit kit for non-invasive pressure measurement (NivLer)
Funding code: 49MF220174
