At the end of our 3-part hybrid workshop series, the topic of “Modelling in Microsystems Technology” was intensively examined on 26th September 2023. Representatives from science and industry discussed methods, software and the use of artificial intelligence for the simulation and design of silicon MEMS and MOEMS.
Prof. Thomas Ortlepp, Managing Director of the CiS Research Institute, warmly welcomed the participants, gave a brief insight into the in-house value chain and emphasised the essential role of modelling for all subsequent processes in order to create reliable, stable and cost-effective products.
As keynote speaker, Prof. Peter Schneider, Fraunhofer Institute for Integrated Circuits IIS, spoke about the challenges and perspectives for the development of adaptive and microelectronic systems. Reliable simulation tools are a prerequisite for supporting the design of components and systems through comprehensive modelling at all levels.
The CiS Research Institute presented specific semiconductor physics simulation tools and project results in three papers.
Dr. Bernhard Schwartz reported on progress in the modelling of piezoresistive measuring bridges. In addition, the challenges of the typical approach for calculating diffused piezoresistive resistances and possible solutions were pointed out. To better match simulation and measurement, a quantum mechanical approach was chosen and it was shown that the conductivity and thus also the piezoresistive coefficients can be calculated from the band structure of silicon.
In another contribution, Dr. Martin Jahn explained various optics simulation tools using concrete application examples. These were compared with each other and the coupling of optical simulations with semiconductor-physical modelling was demonstrated.
The final lecture was given by Dominik Karolewski, also from the CiS Research Institute. He explained the determination of material parameters for polycrystalline silicon using the example of piezoresistive coefficients.
The focus of the workshop was on the field of silicon-based microsystems and offered all participants exciting contributions and plenty of opportunity for exchange and networking.
This concludes this year’s CiS workshop series. We will offer similar events on new topics again in 2024.
