Measurement setup:
On the z-axis of a CNC table is the interdigital structure with an additional touch sensor; the unit can be lowered onto the coated or uncoated wafer surface. The thickness of the coating and the conductivity of the wafer can be measured.
CiS has a long-standing competence in the field of impedance sensor technology. In addition to the classical field of moisture measurement, new fields of application are being developed.
Examples include the investigation of material properties such as the characterization of ADL/CVD coatings with a thickness of a few nm or the doping of wafers to control manufacturing processes in the semiconductor industry.
Biotechnology also offers a variety of potential applications. These include the monitoring of cells under the influence of toxic substances for determining the biocompatibility of substances and products.
Please visit us at the SENSOR+TEST 2012 trade fair,
MNT-Thuringia joint booth hall 12, booth 226
