The UDM research project is aimed at the development and prototype production of piezoresistive absolute pressure sensors with ultra-small dimensions yet very high sensitivities based on single-crystal MSTS membranes
In the BerNieDru research project that has been launched, a piezoresistive pressure sensor is to be developed for the pressure range up to 2 mbar, which can withstand a burst pressure of at least 1 bar by adapting the membrane geometry
In the newly launched M2NL project, a development team at the CiS Research Institute is analyzing measurement data from various piezoresistive pressure sensors and wants to use the analysis results to calculate mechanical parameters and their temperature dependency. The aim is to investigate non-linear effects and their influence in the simulation using the FEM tool ANSYS Multiphysics
Various simulation methods can be used for the development of piezoresistive pressure sensors. The aim of the mMoDS research project is to describe the system model using modular sub-models in order to enable an efficient design process that takes into account different design and technological variants, thereby reducing the number of detailed, computationally intensive FEM simulations
During the Hannover Messe, which starts next week, the CiS Research Institute will be presenting an electrically isolated incremental sensor at the joint Thuringian stand in Hall 3, Stand D76. As part of the GalGiS funding project, new silicon technologies have been developed to achieve such galvanic isolation at chip level
With the MinerVa project, the CiS Research Institute is launching the development of a MEMS Pirani sensor for pressure measurement in the fine high vacuum range. The potential applications are diverse, for example in the production of thin functional layers using physical vapor deposition (PVD)
At the CiS Research Institute, pressure sensors based on NV centers in diamond were produced using industrial manufacturing methods in cooperation with partners from industry and science. The results of the Qind research project will be presented at the 28th Hasselt Diamond Workshop SBDD
In order to improve the performance of piezoresistive pressure sensors, various joining technologies were developed in the completed EFAH research project, which focused in particular on the critical connections between the transducer core and the electrical-mechanical process connection. Glass solders showed clear advantages here
As part of the GREAT H2 final conference, the CiS Research Institute is presenting sensor developments for the industrial application of green hydrogen. In his pitch, Dr. Klaus Ettrich, Head of the MEMS Business Unit at CiS Research Institute, will explain sensor solutions for safe use along the entire value chain of “green hydrogen”. Demonstrators from corresponding research projects will be on display at the trade exhibition
From 13th to 16th November 2023, the COMPAMED, the world’s leading trade fair for the medical technology supply sector, will open its doors in Düsseldorf and we will be presenting applications of silicon-based sensor technology in medical technology at our booth H23-4 in hall 8A within the joint stand of the IVAM trade association.
As part of the COMPAMED HIGH-TECH Forum by IVAM, Dr. Martin Schädel, Business Unit Manager MOEMS, will present selected research and development results on the topic of “Silicon-based microsensors for medical and life science applications” on 13th November
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
