MOEMS – CiS

Project start PuSch – Photostructurable black lacquer against scattered light

9. January 2025/in MOEMS

The aim of the recently launched PuSch research project is to use structurable, optically non-transparent coatings to cover reflective areas on the chip surface of photodiodes and arrays. This suppresses stray light when used in the measuring device and increases the useful portion of the detector signal. When developing the technology, particular attention must be paid to compatibility with downstream processes and operating conditions

Scientists at the CiS Research Institute honored for outstanding developments

13. December 2024/in Events, Medical technology, MEMS, MOEMS

Two important innovations from the CiS Research Institute were ceremoniously honored yesterday at the Ilmenau University of Technology. In the presence of representatives from business, science and politics, the scientists received the coveted iENA Inventor Medals for two pioneering developments that they presented at the 2024 International Trade Fair “Ideas – Inventions – Innovations” in Nuremberg

CiS Forschungsinstitut for the first time at SEMICON in Munich

5. November 2024/in Events, MEMS, MOEMS

From 12th-15th November 2024, we will be showcasing a selection of our research and development results. The European semiconductor industry will meet in the halls of Messe München. Interested visitors will find our stand at the joint Thuringian LEG stand C1718 in Hall C1. We look forward to your visit and a stimulating exchange of ideas

MOEMS workshop on NDIR sensor technology successfully held for the fourth time

29. October 2024/in Events, MOEMS

Last week, the CiS MOEMS workshop “NDIR sensor technology from component to system” entered its fourth edition and offered its participants a wide range of presentations and discussions on current trends and applications on the topic. The first questions for the fifth edition of the NDIR workshop in 2026 have already been formulated

Premiere at the iENA Nuremberg: Focus on innovative sensor technology

24. October 2024/in Events, MEMS, MOEMS

For the first time, we are presenting our developments at the international inventors’ fair iENA in Nuremberg. With over 500 inventions from 31 countries, the iENA is one of the most important platforms for innovations. We are excited to see how our technologies will be received by the visitors and the jury

Doping of MoSi2 resistive heater layers to improve lifetime by reducing electromigration in infrared emitters (DotIR)

2. October 2024/in IR, MOEMS

The aim of the new DotIR research project is to achieve a reduction in electromigration by doping MoSi2 in order to improve the service life of infrared emitters. In addition, it is being investigated whether doping can increase emissivity in the infrared spectral range

CiS Research Institute exhibits at the W3+ Fair

19. September 2024/in Events, MEMS, MOEMS

On 25th and 26th September 2024, experts in future technologies in Central Germany will meet in the Sparkassen-Arena Jena. The CiS Research Institute will also be presenting the latest research results from the field of optics and photonics at its booth F4b in hall 2. Dr. Martin Schädel, Business Unit Manager MOEMS, will be available to answer questions about our trade fair highlights

Project completion MyTZE – Micro thermopile line

10. September 2024/in IR, MOEMS

Miniaturized, infrared-sensitive detectors are required for contact-free temperature measurements as well as imaging and spectroscopic applications in the spectral range from 1 to 15 µm. For this purpose, technologies for membrane generation were developed, selected and realized in the completed MyTZe project

Defect mechanisms in silicon – Four contributions at GADEST 2024

4. September 2024/in Events, MOEMS, Quantum

From 8th-13th September 8 2024, the international conference series GADEST (Gettering and Defect Engineering in Semiconductor Technology) will take place in Bad Schandau. Together with research partners, the CiS Research Institute will present four papers on defect mechanisms in silicon with different dopants

Project start CNT-IR – Infrared emitter with emission-enhancing layer of carbon nanotubes

24. July 2024/in IR, MOEMS

In the newly launched CNT-IR project, carbon nanotubes and encapsulations are to be used to increase the emission of the IR emitter while maintaining the same electrical output. Such light sources are used in particular for optical gas sensors (NDIR sensors)