Highlights of Sensor+Test 2024 in Nuremberg
/in Events, MEMS, MOEMSFrom 11th to 13th June 2024, we look forward to an inspiring dialog with you at our booth at the SENSOR+TEST in Nuremberg. We will present current research results in the development of very high-resolution capacitive MEMS acceleration sensors for inclination and leveling measurements as well as special tandem diodes for a compact standing wave interferometer. The 22nd GMA conference will take place at the same time. Here, the CiS Research Institute will present a diamond-based pressure sensor concept and give a second lecture on fast IR MEMS emitters for NDIR applications
Project start mMoDS – Modular models for piezoresistive pressure sensors
/in MEMS, PressureVarious simulation methods can be used for the development of piezoresistive pressure sensors. The aim of the mMoDS research project is to describe the system model using modular sub-models in order to enable an efficient design process that takes into account different design and technological variants, thereby reducing the number of detailed, computationally intensive FEM simulations
Project start LaWaDos: High-temperature-optimized contact metallizations
/in High Temperature, MEMSThe aim of the LaWaDos research project is to produce high-temperature-stable contact metallizations for wire bonding contacts on sensor elements that allow better monitoring of thermal processes
Packaging technology for thermal flow sensors
/in Medical technology, MEMS, PackagingThe newly launched Pack-Flu project deals with the design, realization and characterization of a robust and innovative packaging platform for low-cost MEMS-based microcalorimetric flow sensors for use in gas pipelines or ventilation systems. The platform serves as a scalable basis for flow sensors for analyzing and controlling air flow, hydrogen and other non-aggressive gases with known flow direction (e.g. in pipelines) with high accuracy
MEMS Pirani sensor for fine and high vacuum
/in MEMS, PressureWith the MinerVa project, the CiS Research Institute is launching the development of a MEMS Pirani sensor for pressure measurement in the fine high vacuum range. The potential applications are diverse, for example in the production of thin functional layers using physical vapor deposition (PVD)
High-end acceleration sensors
/in MEMSThe project dealt with the development of capacitive accelerometers with a resolution of 0.001⁰ based on chip-level processes. The main features are a significantly increased seismic mass, a laterally arranged differential capacitor and a hermetic package
Photoacoustic gas sensors with reference gas sensor
/in MEMSThe focus of the completed PAS research project was the development of a piezoresistive microphone component based on micromechanical systems (MEMS) for highly integrated photoacoustic gas sensors. The sensor is suitable for an application range from -40⁰C to 140⁰C. Applications are in the field of climate and environmental protection to improve energy management, air quality testing or in medical technology as highly sensitive breathing gas sensors.
NanoSense – Development of a hardness measuring head based on a novel combined force-displacement sensor
/in Automotive, Force, Medical technology, MEMSAs part of the ZIM cooperation project NanoSense, the CiS Forschungsinstitut, together with two other partners, developed a measuring head for hardness measurement for integration into universal testing machines and xy manipulators, in which the measuring distance and measuring force are in line with each other
Development of innovative joining technologies for the construction of highly stable pressure transmitters (EFAH)
/in MEMS, PressureIn order to improve the performance of piezoresistive pressure sensors, various joining technologies were developed in the completed EFAH research project, which focused in particular on the critical connections between the transducer core and the electrical-mechanical process connection. Glass solders showed clear advantages here