With a new plasma-assisted etching process, a thin functional membrane and a break trench are simultaneously created for the following chip separation. In MEMS IR emitters, this results in more than a factor of 4 smaller areas and a dynamic range that is 2 times higher than that of the current state of the art
Permanently safe flanged joints are the basic requirements for stable production processes and work at a high safety level. Recently developed silicon-based MEMS sensors are applied to bolt heads and measure their deformation due to changes in the preload force
For the implementation of the National Hydrogen Strategy, the CiS Research Institute is partner in two research projects. The HYPOS consortium develops solutions for the entire value chain and broad application of green hydrogen in many industries
Passivation layers of synthetic diamond are particularly resistant to media. A cost-effective implementation of diamond coatings in relevant sensor areas has been reliably tested by adapting microsystem technologies
After a successful pitch at getstarted2gether, the founding project “Early Fault Detection in High-Performance Batteries” of DC Industrie Entwicklung GmbH is currently being further developed to production and process maturity. The CiS Research Institute supports the start-up during the funding period with its technical infrastructure as well as its competence in silicone from more than 25 years
Within this 1st status workshop on the BMBF growth core HIPS on March 19, Andrea Cyriax will present current developments in the field of MEMS sensor technology. In a second presentation, Dr. Klaus Ettrich will introduce the joint project on gas sensor technology, which is coordinated by the CiS Research Institute
In the chemical industry, for example in the production of battery cells, precise temperature measurement is required. Within the HotSens project, the CiS Forschungsinstitut succeeded in producing temperature diodes for the high temperature range up to a maximum of 300°C with a maximum of a one-point calibration
As part of the Transfer Day 2019 of the TU Ilmenau, the CiS Research Institute was represented last week with two contributions
At the Compamed in Düsseldorf, which starts today, the Thuringian research institution, founded in 1993, will present current research results. The development of silicon-based microsensor elements for applications in industry, medicine and the environment has been a core competence of the CiS Research Institute for many years
The InnoCON is a platform that presents successful projects and invites networking. The CiS Research Institute presented technological challenges of the project “TeSIS – Textured Blackbody MEMS IR Emitter” and presented itself at the joint stand of the FTVT
Konrad-Zuse-Str. 14
99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
