Exhibition booth at HM21 Digital Edition
This week at HM21 Digital Edition, we present current research topics and project results in the development of silicon-based MEMS and MOEMS sensor concepts
First Status Workshop of the BMBF Growth Core HIPS
/in Events, MEMS, Packaging, WaferprocessingThe 1st status workshop of the BMBF growth core HIPS will take place on April 7, 2021 as a free online event. Organized by the host TU Ilmenau, guests and interested parties are welcome from 9:00 to 16:30. The CiS Research Institute is involved in two projects to develop an innovative multi-sensor platform for capturing sensor information in challenging environments
H2MEMS – Novel hydrogen sensor with highest sensitivity and selectivity based on silicon-based MEMS sensor structures
/in Energy, MEMS, PressureAs a specialist in the development of silicon-based pressure sensors, the CiS Research Institute is developing and testing palladium-coated MEMS structures with its partners in the H2MEMS project. The volume expansion of palladium during hydrogen deposition is being tested as a measuring principle
NanoSense – Development of a hardness measuring head based on a novel combined force-displacement sensor
/in Force, MEMSFor the determination of surface hardness in the nanometer range, a new measuring head combining a force and displacement sensor is being developed in the recently launched “NanoSense” project. It is to be connected modularly to common universal testing machines and XY-axis manipulators
Webinar with Live Demo: Silicon-based Piezoresistive Force Sensors
/in Events, Force, MEMS, PackagingMEMS-based piezoresistive force sensors can be used to monitor preload forces or contact forces. Our webinar will go into the technical basics of such sensors and we will show you some demonstrators of silicon strain gauges (Si strain gauges) developed by us
AmmoniaSense – Development of an in-line measuring system using an innovative ammonia sensor
/in Energy, MEMSThe aim of the newly launched ZIM cooperation project AmmoniaSense is to record the ammonia concentration with a stationary inline measuring system in order to optimally control biogas plants. The CiS Research Institute is developing the ammonia sensor system, which will be used in combination with a hydrogen sulphide sensor
Innovative process and safety sensor technology for “green hydrogen”
/in Energy, MEMSThe German government’s National Hydrogen Strategy is a building block for a successful climate change and secure energy supply. As a development partner for application-specific silicon sensors, the CiS Research Institute is dedicated to the topic of “green hydrogen” in research projects. Cooperation on current research topics, including hydrogen, is bundled at the regional level by the FTVT
Long-term stable passivation of piezoresistive sensors for demanding sensor environments
/in MEMS, PressureDirect contact with the medium is difficult to implement for silicon-based microsensors. In order to fully exploit miniaturisation, corrosion protection is applied at chip level. This makes an application in more demanding environments possible even without additional protective constructions
SiCer technology for high performance sensor systems
/in Energy, Medical technology, MEMSAt InnoCON Thuringia on 24th November 2020, Dr. Olaf Brodersen will explain the latest results of the growth core HIPs and the SiCer technologies to be developed therein for high performance sensor systems. The InnoCON starts as online event at 3:00 PM
Patent application for multilayer structures for chemically resistant, long-term stable differential pressure sensors
/in MEMS, PressureHarsh environmental conditions require robust and stable pressure sensors. The new and further development of wafer-level packaging technologies increases performance, extends areas of application and reduces manufacturing costs. The result is patent pending