New methods in the development and application of silicon sensors – this was the topic of the MEMS workshop on 06.11.2024. The event focused on developments in the areas of sensor elements, assembly and connection technology as well as characterization of sensors, in particular pressure sensors and strain gauges in selected application areas
From 12th-15th November 2024, we will be showcasing a selection of our research and development results. The European semiconductor industry will meet in the halls of Messe München. Interested visitors will find our stand at the joint Thuringian LEG stand C1718 in Hall C1. We look forward to your visit and a stimulating exchange of ideas
For the first time, we are presenting our developments at the international inventors’ fair iENA in Nuremberg. With over 500 inventions from 31 countries, the iENA is one of the most important platforms for innovations. We are excited to see how our technologies will be received by the visitors and the jury
On 16th and 17th October 2024, experts from various fields of knowledge will address the use of hydrogen and the associated challenges for its safe use at the elmug4future technology conference. Dr. Heike Wünscher and Dr. Ingo Tobehn-Steinhäuser from the CiS Research Institute will present current sensor developments and research projects for hydrogen measurement technology in their lectures
On 25th and 26th September 2024, experts in future technologies in Central Germany will meet in the Sparkassen-Arena Jena. The CiS Research Institute will also be presenting the latest research results from the field of optics and photonics at its booth F4b in hall 2. Dr. Martin Schädel, Business Unit Manager MOEMS, will be available to answer questions about our trade fair highlights
The aim of the new Flunder research project is to investigate how suitable measures can be taken to minimize the temperature dependence of the measurement signal in hybrid monocrystalline silicon strain gauge sensors (SiDMS)
The UDM research project is aimed at the development and prototype production of piezoresistive absolute pressure sensors with ultra-small dimensions yet very high sensitivities based on single-crystal MSTS membranes
In the BerNieDru research project that has been launched, a piezoresistive pressure sensor is to be developed for the pressure range up to 2 mbar, which can withstand a burst pressure of at least 1 bar by adapting the membrane geometry
The aim of the new “DMS in ceramics” project is to develop a process for a differential pressure sensor with a media-resistant ceramic bending plate and integrated Si-DMS. By fully integrating the Si strain gauge during the lamination of the Low Temperature Co-fired Ceramics (LTCC), it is hermetically sealed and protected against mechanical manipulation
In the newly launched M2NL project, a development team at the CiS Research Institute is analyzing measurement data from various piezoresistive pressure sensors and wants to use the analysis results to calculate mechanical parameters and their temperature dependency. The aim is to investigate non-linear effects and their influence in the simulation using the FEM tool ANSYS Multiphysics
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99099 Erfurt
Germany
Tel.: +49 361 663 1410
E-Mail: info@cismst.de
