MOEMS

The MOEMS department develops and investigates optical components, sensors and systems. The focus is on measured quantities such as reflectivity, transmission, absorption, scattering angle, opacity, angle of incidence and polarization of light as well as beam profile and light spectrum.

However, mechanical, physiological and chemical quantities are also measured if they are traceable to optical quantities, such as concentration, flow velocity, length, roughness, angle of rotation, inclination, magnetic field strength as well as vital signs such as blood pressure, oxygen saturation, heart rate and heart rate variability.

In-house fabricated devices are made of silicon and layers of metals, oxides or nitrides. MOEMS devices are fabricated using semiconductor processes and are applied in the spectral range from 180 nm to 15 µm. Our basic devices are:

• Photodiodes and photodiode arrays
• Silicon photomultipliers
• Infrared emitters and detectors
• Fiber couplers

In close collaboration with our departments for Simulation & Design, Process Development, Wafer Processing, Packaging and Measurement & Analytics, we offer a closed value chain from the analysis of the measurement task to the prototype and small series. In doing so, we use radiation and wave-optical modeling methods, develop sensor-related electronic circuits and manufacture automated optical test stations.