A modular technology concept enables the efficient development of optical sensors with embedded light sources, micro-optics for beam shaping or steering, optical filters and an optimised detector array. User-friendly miniaturised designs with smooth, planar surfaces are achieved by using microsystem technologies. The modular principle aims at cost-effective and reliable solutions and enables high variability in a wide range of applications.
Applications range from fluorescence sensors for bioanalytics, particle, levelling and vibration sensors for industrial measurement technology to medical sensors for cardiovascular diagnostics (photoplethysmography). Light-emitting diode chips in the wavelength range from 400 to 1000 nm are used as excitation sources, but increasingly also modern powerful laser sources such as vertically emitting VCSELs or optical fibres. Absorption, reflection, scattering and luminescence are the physical measurement principles used. Especially for the measurement of fluorescence intensity or decay time, the sensor is equipped with a combination of absorption and interference filters.
In an extension of the sensor platform, the chip-near 3D assembly of signal amplifiers or A/D converters will be possible by means of Si through-hole plating technologies before the end of this year.
